00914nam0-22003251i-450-99000048971040332120071113094856.00-7131-3365-1000048971FED01000048971(Aleph)000048971FED0100004897120020821d1976----km-y0itay50------baenga-------001yyIon implantation of semiconductorsG. Carter, W. A. GrantLondonEdward Arnoldc1976214 p.ill.24 cmImpiantazione ionicaDrogaggio621.381'52Carter,George235809Grant,William Alexander491749ITUNINARICAUNIMARCBK99000048971040332110 E I 2568991DINELDINELIon implantation of semiconductors332668UNINA