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200 1 $aSemiconductor lithography$eprinciples, practices and materials$fWayne M. Moreau
210   $aNew York$cPlenum Press$dİ1988
215   $a931 p.$cill.$d26 cm
225 1 $aMicrodevices
610 0 $aSemiconduttori
610 0 $aMicrolitografia elettronica
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700  1$aMoreau,$bWayne M.
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