LEADER 00786nam0-22002891i-450- 001 990001090900403321 010 $a0-677-15000-8 035 $a000109090 035 $aFED01000109090 035 $a(Aleph)000109090FED01 035 $a000109090 100 $a20000920d1971----km-y0itay50------ba 101 0 $aeng 200 1 $aIon Implantation$fEdited by Fred H. Eisen, Lewis T. Chadderton 210 $aLondon [etc.]$cGordon and Breach$d1971 610 0 $aSemiconduttori 676 $a537.622 700 1$aEisen,$bFred H.$051913 702 1$aChadderton,$bLewis T. 801 0$aIT$bUNINA$gRICA$2UNIMARC 901 $aBK 912 $a990001090900403321 952 $a30-085.001$b16301$fFI1 959 $aFI1 996 $aIon Implantation$9335742 997 $aUNINA DB $aING01