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100   $a--------a19839999km-y0itaa50------ba
101 0 $aeng
102   $aUS
200 1 $aJournal of vacuum science & technology B online
207  1$a1983-
210   $aWoodbury, N.Y.$cAmerican Institute of Physics
452  0$1001000899585$12001$aJournal of vacuum science & technology B: Microelectronics processing and phenomena
452  0$1001000899586$12001$aJournal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena
530 0 $aJournal of vacuum science & technology B online
676   $a621
801  0$aIT$bACNP$c20090723
859 4 $uhttp://acnp.cib.unibo.it/cgi-ser/start/it/cnr/dc-p1.tcl?catno=2111037&person=false&language=ITALIANO&libr=&libr_th=unina1$zBiblioteche che possiedono il periodico
901   $aSE
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958   $aBiblioteca "Roberto Stroffolini" - Dipartimento di Scienze Fisiche dell'Università Federico II$b1983-$fFI1
959   $aFI1
996   $aJournal of vacuum science & technology B online$9791403
997   $aUNINA
AP1 8 $6866-01$aNA079 Biblioteca "Roberto Stroffolini" - Dipartimento di Scienze Fisiche dell'Università Federico II$eVia Cintia-Monte S. Angelo, 80126 Napoli (NA)$m081.676253;676756;676443$m081.676434$nit
AP2 4 $uhttp://ojps.aip.org/jvstb/